Invention Grant
- Patent Title: Layer by layer electro chemical plating (ECP) process
- Patent Title (中): 逐层电化学镀(ECP)工艺
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Application No.: US13778412Application Date: 2013-02-27
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Publication No.: US09435048B2Publication Date: 2016-09-06
- Inventor: Su-Horng Lin , Chi-Ming Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: C25D5/18
- IPC: C25D5/18 ; C25D7/12 ; C25D21/12 ; C25D17/00

Abstract:
The present disclosure relates to an electro-chemical plating (ECP) process that provides for an isotropic deposition, and a related apparatus. In some embodiments, the disclosed ECP process is performed by providing a substrate into an electroplating solution comprising a plurality of ions of a material to be deposited. A periodic patterned signal, which alternates between a first value and a different second value, is applied to the substrate. When the periodic patterned signal is at the first value, ions from the electroplating solution affix to the substrate. When the periodic patterned signal is at the second value, ions from the electroplating solution do not affix to the substrate. By using the periodic patterned signal to perform electro-chemical plating, the deposition rate of the plating process is reduced, resulting in an isotropic deposition over the substrate that mitigates gap fill problems (e.g., void formation).
Public/Granted literature
- US20140238864A1 Layer by Layer Electro Chemical Plating (ECP) Process Public/Granted day:2014-08-28
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