Invention Grant
- Patent Title: Layout pattern and photomask including the same
- Patent Title (中): 布局图案和光掩模包括相同
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Application No.: US14588013Application Date: 2014-12-31
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Publication No.: US09442366B2Publication Date: 2016-09-13
- Inventor: Chiung-Jung Tu , Chih-Hao Huang
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: G03F1/38
- IPC: G03F1/38 ; G03F1/36

Abstract:
A layout pattern and a photomask including the layout pattern are provided. The layout pattern includes a plurality of main patterns and at least one auxiliary pattern. The main patterns are arranged in parallel to one another and extend in a first direction. The at least one auxiliary pattern is located between two outermost main patterns and connects the two outermost main patterns. The at least one auxiliary pattern is arranged in a second direction. The second direction is different from the first direction.
Public/Granted literature
- US20160187768A1 LAYOUT PATTERN AND PHOTOMASK INCLUDING THE SAME Public/Granted day:2016-06-30
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