Invention Grant
US09443990B2 Semiconductor device and method for manufacturing semiconductor device for adjusting threshold thereof
有权
用于制造用于调整其阈值的半导体器件的半导体器件和方法
- Patent Title: Semiconductor device and method for manufacturing semiconductor device for adjusting threshold thereof
- Patent Title (中): 用于制造用于调整其阈值的半导体器件的半导体器件和方法
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Application No.: US14464966Application Date: 2014-08-21
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Publication No.: US09443990B2Publication Date: 2016-09-13
- Inventor: Kiyoshi Kato , Yasuhiko Takemura , Tetsuhiro Tanaka , Takayuki Inoue , Toshihiko Takeuchi , Yasumasa Yamane , Shunpei Yamazaki
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2013-174405 20130826
- Main IPC: H03K19/003
- IPC: H03K19/003 ; H01L21/324 ; H01L29/792 ; H01L21/28 ; H01L29/423 ; H01L29/66 ; G11C16/04 ; H01L27/12 ; H03K19/00 ; H03K19/177

Abstract:
A manufacturing method of a semiconductor device in which the threshold is adjusted is provided. In a semiconductor device including a plurality of transistors arranged in a matrix each including a semiconductor, a source or drain electrode electrically connected to the semiconductor, a gate electrode, and a charge trap layer between the gate electrode and the semiconductor, electrons are trapped in the charge trap layer by performing heat treatment and, simultaneously, keeping a potential of the gate electrode higher than that of the source or drain electrode for 1 second or more. By this process, the threshold increases and Icut decreases. A circuit that supplies a signal to the gate electrode (e.g., word line driver) is provided with a selection circuit formed of an OR gate, an XOR gate, or the like, whereby potentials of word lines can be simultaneously set higher than potentials of bit lines.
Public/Granted literature
- US20150054548A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2015-02-26
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