Invention Grant
US09462206B2 Integrated multi-channel analog front end and digitizer for high speed imaging applications
有权
集成多通道模拟前端和数字化仪,用于高速成像应用
- Patent Title: Integrated multi-channel analog front end and digitizer for high speed imaging applications
- Patent Title (中): 集成多通道模拟前端和数字化仪,用于高速成像应用
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Application No.: US14272454Application Date: 2014-05-07
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Publication No.: US09462206B2Publication Date: 2016-10-04
- Inventor: David L. Brown , Mansour Kermat , Lance Glasser , Henrik Nielsen , Guowu Zheng , Kurt Lehman , Kenneth F. Hatch , Yung-Ho Chuang , Venkatraman Iyer
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Coporation
- Current Assignee: KLA-Tencor Coporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H04N5/335
- IPC: H04N5/335 ; H04N5/228 ; H04N5/378 ; H04N5/372 ; H01L27/146 ; H04N5/369

Abstract:
A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.
Public/Granted literature
- US20140240562A1 Integrated Multi-Channel Analog Front End And Digitizer For High Speed Imaging Applications Public/Granted day:2014-08-28
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