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公开(公告)号：US10724964B1
公开(公告)日：2020-07-28
申请号：US16379900
申请日：2019-04-10
发明人： Pablo Pombo , Kurt Lehman
摘要： Sensor units can be disposed in a support member. Each of the sensor units can include a folded flex board having a plurality of laminations and an aperture and a sensor disposed in the folded flex board such that the sensor is positioned over the aperture. The system can be used in broad band plasma inspection tools for semiconductor wafers.
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2.发明申请Integrated Multi-Channel Analog Front End And Digitizer For High Speed Imaging Applications 有权用于高速成像应用的集成多通道模拟前端和数字转换器公开(公告)号：US20140240562A1
公开(公告)日：2014-08-28
申请号：US14272454
申请日：2014-05-07
发明人： David L. Brown , Mansour Kermat , Lance Glasser , Henrik Nielsen , Guowu Zheng , Kurt Lehman , Kenneth F. Hatch , Yung-Ho Chuang , Venkatraman Iyer
IPC分类号： H04N5/378
CPC分类号： H04N5/378 , H01L27/14634 , H04N5/3694 , H04N5/37206 , H04N5/37213
摘要： A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.
摘要翻译： 用于高速图像处理的模块包括用于产生表示图像的多个模拟输出的图像传感器和用于同时处理多个模拟输出的多个HDD。 每个HDD是被配置为并行处理预定的一组模拟输出的集成电路。 HDD的每个通道可以包括用于调节表示一个传感器模拟输出的信号的AFE，用于将经调节的信号转换成数字信号的ADC，以及用于校准和格式化数字信号以传送到芯片外的数据格式化块 设备。 HDD和驱动电子设备与图像传感器组合成一个封装，以优化信号完整性和高动态范围，并通过使用同步的HDD通道实现高数据速率。 组合多个模块可实现高度可扩展的成像子系统，以优化检测和计量应用。
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3.发明授权Integrated multi-channel analog front end and digitizer for high speed imaging applications 有权集成多通道模拟前端和数字化仪，用于高速成像应用公开(公告)号：US09462206B2
公开(公告)日：2016-10-04
申请号：US14272454
申请日：2014-05-07
发明人： David L. Brown , Mansour Kermat , Lance Glasser , Henrik Nielsen , Guowu Zheng , Kurt Lehman , Kenneth F. Hatch , Yung-Ho Chuang , Venkatraman Iyer
CPC分类号： H04N5/378 , H01L27/14634 , H04N5/3694 , H04N5/37206 , H04N5/37213
摘要： A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.
摘要翻译： 用于高速图像处理的模块包括用于产生表示图像的多个模拟输出的图像传感器和用于同时处理多个模拟输出的多个HDD。 每个HDD是被配置为并行处理预定的一组模拟输出的集成电路。 HDD的每个通道可以包括用于调节表示一个传感器模拟输出的信号的AFE，用于将经调节的信号转换成数字信号的ADC，以及用于校准和格式化数字信号以传送到芯片外的数据格式化块 设备。 HDD和驱动电子设备与图像传感器组合成一个封装，以优化信号完整性和高动态范围，并通过使用同步的HDD通道实现高数据速率。 组合多个模块可实现高度可扩展的成像子系统，以优化检测和计量应用。
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