发明授权
- 专利标题: Ceramic material and sputtering target member
- 专利标题(中): 陶瓷材料和溅射靶材
-
申请号: US14692922申请日: 2015-04-22
-
公开(公告)号: US09475733B2公开(公告)日: 2016-10-25
- 发明人: Yosuke Sato , Yoshinori Isoda , Yuji Katsuda
- 申请人: NGK Insulators, Ltd.
- 申请人地址: JP Nagoya
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya
- 代理机构: Burr & Brown, PLLC
- 优先权: JP2012-245465 20121107
- 主分类号: C04B35/053
- IPC分类号: C04B35/053 ; C23C14/34 ; C04B35/04 ; H01L43/10 ; C23C14/08 ; H01L21/02 ; H01L43/12 ; G11B5/39
摘要:
The present invention provides a ceramic material comprising magnesium, gallium, lithium, and oxygen as main components, wherein a crystal phase of a solid solution attained by dissolving gallium oxide and lithium oxide in magnesium oxide is a main phase. An XRD peak of a (200) plane of the solid solution with CuKα rays preferably appears at 2θ=42.91° or more which is larger than an angle at which a peak of a Cubic crystal of magnesium oxide appears, more preferably appears at 2θ=42.91° to 43.28°, and further preferably appears at 2θ=42.91° to 43.02°. In the ceramic material, a molar ratio Li/Ga of Li to Ga is preferably 0.80 or more and 1.20 or less.
公开/授权文献
- US20150225297A1 CERAMIC MATERIAL AND SPUTTERING TARGET MEMBER 公开/授权日:2015-08-13
信息查询
IPC分类: