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公开(公告)号：US11198648B2
公开(公告)日：2021-12-14
申请号：US15463251
申请日：2017-03-20
Applicant: NGK INSULATORS, LTD.
Inventor： Yoshinori Isoda , Yoshio Suzuki , Katsuhiro Inoue , Yuji Katsuda
IPC: C04B35/195 , C04B35/626 , C04B35/645 , C04B37/00 , H01L41/00
Abstract: A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 μm or less.
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公开(公告)号：US09437463B2
公开(公告)日：2016-09-06
申请号：US13863729
申请日：2013-04-16
Applicant: NGK INSULATORS, LTD.
Inventor： Nobuyuki Kondo , Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda
IPC: H05B3/68 , H01L21/67 , C04B35/581 , H05B1/00 , B32B18/00 , H05B3/28 , H01L21/683 , C04B35/58 , C04B35/626 , C04B35/645 , C04B37/00 , C23C14/34
CPC classification number: H01L21/67 , B32B18/00 , C04B35/58 , C04B35/581 , C04B35/6261 , C04B35/62655 , C04B35/645 , C04B37/001 , C04B37/003 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/3865 , C04B2235/5445 , C04B2235/77 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , C04B2237/08 , C04B2237/34 , C04B2237/343 , C04B2237/36 , C04B2237/366 , C04B2237/58 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C23C14/3414 , H01L21/6831 , H05B1/00 , H05B3/283 , Y10T428/24942
Abstract: A heating apparatus includes a susceptor having a heating face of heating a semiconductor and a supporting part joined with a back face of the susceptor. The susceptor comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° by CuKα X-ray.
Abstract translation: 加热装置包括具有加热半导体的加热面的基座和与基座的背面接合的支撑部。 感受体包括以镁，铝，氧和氮为主要成分的陶瓷材料。 该材料包括主相，其包含通过CuKαX射线表现出至少2θ= 47至50°的XRD峰的镁 - 铝氧氮化物相。
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公开(公告)号：US09409824B2
公开(公告)日：2016-08-09
申请号：US14692955
申请日：2015-04-22
Applicant: NGK Insulators, Ltd.
Inventor： Yosuke Sato , Yoshinori Isoda , Yuji Katsuda
IPC: C04B35/053 , C04B35/04 , H01L43/10 , H01L43/12 , G11B5/39 , C23C14/08 , C23C14/34 , G01R33/09 , C01G25/00 , G01R33/00
CPC classification number: C04B35/04 , C01G25/006 , C01P2002/72 , C01P2002/74 , C01P2006/14 , C04B35/053 , C04B2235/3203 , C04B2235/3244 , C04B2235/76 , C04B2235/77 , C23C14/08 , C23C14/3414 , G01R33/0052 , G01R33/098 , G11B5/3909 , H01L43/10 , H01L43/12
Abstract: A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuKα rays preferably appears at 2θ=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2θ=42.38° to 42.89° and further preferably at 2θ=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less.
Abstract translation: 本发明的陶瓷材料含有镁，锆，锂和氧作为主要成分。 通过将氧化锆和氧化锂溶解在氧化镁中而获得的固溶体的结晶相是主相。 具有CuKα射线的固溶体的（200）面的XRD峰最好出现在2θ= 42.89°以下，小于出现氧化镁的立方晶的峰的角度。 更优选的XRD峰出现在2θ= 42.38°〜42.89°，进一步优选在2θ= 42.82°〜42.89°。 在陶瓷材料中，Li与Zr的摩尔比Li / Zr优选为1.96以上且2.33以下。
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公开(公告)号：US09475733B2
公开(公告)日：2016-10-25
申请号：US14692922
申请日：2015-04-22
Applicant: NGK Insulators, Ltd.
Inventor： Yosuke Sato , Yoshinori Isoda , Yuji Katsuda
CPC classification number: C04B35/04 , C04B35/053 , C04B2235/3203 , C04B2235/3286 , C04B2235/76 , C04B2235/77 , C23C14/08 , C23C14/3414 , G11B5/3909 , H01L21/02175 , H01L21/02194 , H01L21/02266 , H01L43/10 , H01L43/12
Abstract: The present invention provides a ceramic material comprising magnesium, gallium, lithium, and oxygen as main components, wherein a crystal phase of a solid solution attained by dissolving gallium oxide and lithium oxide in magnesium oxide is a main phase. An XRD peak of a (200) plane of the solid solution with CuKα rays preferably appears at 2θ=42.91° or more which is larger than an angle at which a peak of a Cubic crystal of magnesium oxide appears, more preferably appears at 2θ=42.91° to 43.28°, and further preferably appears at 2θ=42.91° to 43.02°. In the ceramic material, a molar ratio Li/Ga of Li to Ga is preferably 0.80 or more and 1.20 or less.
Abstract translation: 本发明提供一种以镁，镓，锂和氧为主要成分的陶瓷材料，其中通过将氧化镓和氧化锂溶解在氧化镁中而获得的固溶体的结晶相是主相。 具有CuKα射线的固溶体的（200）面的XRD峰优选出现在2θ= 42.91°以上，其比出现氧化镁立方晶体的峰的角度大，更优选出现在2θ= 42.91°〜43.28°，进一步优选为2θ= 42.91°〜43.02°。 在陶瓷材料中，Li与Ga的Li / Ga摩尔比优选为0.80以上且1.20以下。
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公开(公告)号：US08945390B2
公开(公告)日：2015-02-03
申请号：US13621391
申请日：2012-09-17
Applicant: NGK Insulators, Ltd.
Inventor： Akimasa Ichikawa , Kenji Suzuki , Naoto Kinoshita , Yoshinori Isoda , Takafumi Kimata
CPC classification number: B01D67/0067 , B01D61/362 , B01D71/021 , B01D2323/12 , C08G8/08
Abstract: A carbon membrane formed by carbonizing a phenol resin having at least one kind of atomic groups among a methylene bond, a dimethylene ether bond, and a methylol group, wherein the total mole content of the atomic groups is 100 to 180% with respect to the phenolic nuclei. A pervaporation separation method using the carbon membrane is also disclosed.
Abstract translation: 通过将亚甲基键，二亚甲基醚键和羟甲基中的至少一种原子团的酚醛树脂碳化而形成的碳膜，其中，原子团的总摩尔量相对于原子团为100〜180％ 酚醛核。 还公开了使用碳膜的渗透蒸发分离方法。
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Patent Agency Ranking
6.发明授权公开(公告)号：US09981876B2
公开(公告)日：2018-05-29
申请号：US15454180
申请日：2017-03-09
Applicant: NGK INSULATORS, LTD.
Inventor： Yoshinori Isoda , Yoshio Suzuki , Katsuhiro Inoue , Yuji Katsuda
IPC: C04B35/185 , C04B35/584 , C04B35/597 , C04B35/599 , C04B35/645 , B32B9/00
CPC classification number: C04B35/185 , B32B3/26 , B32B7/04 , B32B9/005 , B32B9/04 , B32B2250/02 , B32B2307/30 , B32B2307/50 , B32B2307/538 , B32B2307/546 , B32B2429/00 , B32B2457/00 , C04B35/62655 , C04B35/645 , C04B37/001 , C04B2235/3463 , C04B2235/3869 , C04B2235/3873 , C04B2235/5436 , C04B2235/602 , C04B2235/656 , C04B2235/6562 , C04B2235/6567 , C04B2235/72 , C04B2235/76 , C04B2235/77 , C04B2235/785 , C04B2235/786 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , C04B2235/963 , C04B2237/34 , C04B2237/341 , C04B2237/704
Abstract: A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 μm or less.
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公开(公告)号：US09287144B2
公开(公告)日：2016-03-15
申请号：US13863803
申请日：2013-04-16
Applicant: NGK INSULATORS, LTD.
Inventor： Nobuyuki Kondo , Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda
IPC: H05B3/02 , H01L21/67 , C04B35/581 , H05B1/00 , B32B18/00 , H05B3/28 , H01L21/683 , C04B35/58 , C04B35/626 , C04B35/645 , C04B37/00 , C23C14/34
CPC classification number: H01L21/67 , B32B18/00 , C04B35/58 , C04B35/581 , C04B35/6261 , C04B35/62655 , C04B35/645 , C04B37/001 , C04B37/003 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/3865 , C04B2235/5445 , C04B2235/77 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , C04B2237/08 , C04B2237/34 , C04B2237/343 , C04B2237/36 , C04B2237/366 , C04B2237/58 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C23C14/3414 , H01L21/6831 , H05B1/00 , H05B3/283 , Y10T428/24942
Abstract: A heating apparatus 1A includes a susceptor part 9A having a heating face 9a of heating a semiconductor W, and a ring shaped part 6A provided in the outside of the heating face 9a. The ring shaped part 6A is composed of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° taken by using CuKα ray.
Abstract translation: 加热装置1A包括具有加热半导体W的加热面9a的基座部9A和设置在加热面9a的外侧的环状部6A。 环形部6A由以镁，铝，氧，氮为主要成分的陶瓷材料构成。 陶瓷材料包括主相，其包含镁 - 铝氧氮化物相，其表现出至少2％的XRD峰; =通过使用CuKα射线摄取47至50°。
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公开(公告)号：US09202718B2
公开(公告)日：2015-12-01
申请号：US13864467
申请日：2013-04-17
Applicant: NGK INSULATORS, LTD.
Inventor： Kenichiro Aikawa , Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda
IPC: H01L21/683 , H01L21/67 , C04B35/581 , H05B1/00 , B32B18/00 , H05B3/28 , C04B35/58 , C04B35/626 , C04B35/645 , C04B37/00 , C23C14/34
CPC classification number: H01L21/67 , B32B18/00 , C04B35/58 , C04B35/581 , C04B35/6261 , C04B35/62655 , C04B35/645 , C04B37/001 , C04B37/003 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/3865 , C04B2235/5445 , C04B2235/77 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , C04B2237/08 , C04B2237/34 , C04B2237/343 , C04B2237/36 , C04B2237/366 , C04B2237/58 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C23C14/3414 , H01L21/6831 , H05B1/00 , H05B3/283 , Y10T428/24942
Abstract: An electrostatic chuck 1A includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor 11A includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° by CuKα X-ray.
Abstract translation: 静电吸盘1A包括具有吸附半导体的吸附面11a的基座11A和嵌入基座的静电卡盘电极4。 基座11A包括板状主体3和包括吸附面2的表面耐腐蚀层2.表面耐腐蚀层2由以镁，铝，氧和氮为主要成分的陶瓷材料制成。 陶瓷材料包括主相，其包含镁 - 铝氧氮化物相，其表现出至少2％的XRD峰;通过CuKαX射线显示47至50°。
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公开(公告)号：US11035055B2
公开(公告)日：2021-06-15
申请号：US16385380
申请日：2019-04-16
Applicant: NGK INSULATORS, LTD.
Inventor： Yoshinori Isoda , Suguru Noguchi , Tetsuya Uchikawa , Takayuki Hirao , Takanao Shimodaira , Katsuhiro Imai
Abstract: It is provided a layer of a nitride of a group 13 element having a first main face and second main face. The layer of the nitride of the group 13 element includes a first void-depleted layer provided on the side of the first main face, a second void-depleted layer provided on the side of the second main face, and the void-distributed layer provided between the first void-depleted layer and second void-depleted layer.
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公开(公告)号：US09892950B2
公开(公告)日：2018-02-13
申请号：US14246639
申请日：2014-04-07
Applicant: NGK Insulators, Ltd.
Inventor： Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda , Atsushi Watanabe
IPC: H01L21/683 , C04B35/58 , C04B35/053
CPC classification number: H01L21/6831 , C04B35/053 , C04B35/58 , C04B2235/3217 , C04B2235/3222 , C04B2235/3865 , C04B2235/6586 , C04B2235/76 , C04B2235/77 , C04B2235/80 , C04B2235/9607 , H01L21/6833
Abstract: A ceramic member 30 according to the present invention includes a ceramic base 32, which contains a solid solution Mg(Al)O(N) in which Al and N components are dissolved in magnesium oxide as the main phase, and an electrode 34 disposed on a portion of the ceramic base 32 and containing at least one of nitrides, carbides, carbonitrides, and metals as an electrode component. The ceramic base 32 may have an XRD peak of a (111), (200), or (220) plane of Mg(Al)O(N) measured using a CuKα ray at 2θ=36.9 to 39, 42.9 to 44.8, or 62.3 to 65.2 degrees, respectively, between a magnesium oxide cubic crystal peak and an aluminum nitride cubic crystal peak.
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