发明授权
- 专利标题： Dummy metal with zigzagged edges
- 专利标题（中）： 虚拟金属曲折边缘
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申请号： US14858558申请日： 2015-09-18
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公开(公告)号： US09502343B1公开(公告)日： 2016-11-22
- 发明人: Cheng-Hsien Hsieh , Hsien-Wei Chen , Chi-Hsi Wu , Chen-Hua Yu , Der-Chyang Yeh , Li-Han Hsu , Wei-Cheng Wu
- 申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址： TW Hsin-Chu
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW Hsin-Chu
- 代理机构： Slater Matsil, LLP
- 主分类号： H01L23/52
- IPC分类号： H01L23/52 ; H01L23/498 ; H01L23/31
摘要：
A structure includes a metal pad, a passivation layer having a portion covering edge portions of the metal pad, and a dummy metal plate over the passivation layer. The dummy metal plate has a plurality of through-openings therein. The dummy metal plate has a zigzagged edge. A dielectric layer has a first portion overlying the dummy metal plate, second portions filling the first plurality of through-openings, and a third portion contacting the first zigzagged edge.
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