Invention Grant
- Patent Title: Substrate treating apparatus and method
- Patent Title (中): 底物处理装置及方法
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Application No.: US14556334Application Date: 2014-12-01
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Publication No.: US09506695B2Publication Date: 2016-11-29
- Inventor: Ki-Bong Kim , Seong-Soo Kim , Woo-Young Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Carter, DeLuca, Farrell & Schmidt, LLP
- Priority: KR10-2013-0147464 20131129; KR10-2014-0011139 20140129
- Main IPC: F26B21/00
- IPC: F26B21/00 ; H01L21/67

Abstract:
Provided is a substrate treating apparatus. The substrate treating apparatus includes a first unit, a second unit, a supply line connecting the first unit to the second unit to supply a supercritical fluid from the first unit to the second unit, a flow rate adjustment member disposed in the supply line, and a filter disposed in the supply line to remove foreign substances. The supply line disposed between the flow rate adjustment member and the filter is disposed to get out of a straight line.
Public/Granted literature
- US20150155158A1 SUBSTRATE TREATING APPARATUS AND METHOD Public/Granted day:2015-06-04
Information query
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