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公开(公告)号：US09506695B2
公开(公告)日：2016-11-29
申请号：US14556334
申请日：2014-12-01
Applicant: SEMES CO., LTD.
Inventor： Ki-Bong Kim , Seong-Soo Kim , Woo-Young Kim
CPC classification number: F26B21/003 , H01L21/67017 , H01L21/67034 , H01L21/67051
Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes a first unit, a second unit, a supply line connecting the first unit to the second unit to supply a supercritical fluid from the first unit to the second unit, a flow rate adjustment member disposed in the supply line, and a filter disposed in the supply line to remove foreign substances. The supply line disposed between the flow rate adjustment member and the filter is disposed to get out of a straight line.
Abstract translation: 提供了一种基板处理装置。 基板处理装置包括第一单元，第二单元，将第一单元连接到第二单元的供应线，以将超临界流体从第一单元供应到第二单元，设置在供给管线中的流量调节构件，以及 设置在供给管线中以除去异物的过滤器。 设置在流量调节构件和过滤器之间的供给管线被设置为脱离直线。
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公开(公告)号：US20150155158A1
公开(公告)日：2015-06-04
申请号：US14556334
申请日：2014-12-01
Applicant: SEMES CO., LTD.
Inventor： Ki-Bong Kim , Seong-Soo Kim , Woo-Young Kim
CPC classification number: F26B21/003 , H01L21/67017 , H01L21/67034 , H01L21/67051
Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes a first unit, a second unit, a supply line connecting the first unit to the second unit to supply a supercritical fluid from the first unit to the second unit, a flow rate adjustment member disposed in the supply line, and a filter disposed in the supply line to remove foreign substances. The supply line disposed between the flow rate adjustment member and the filter is disposed to get out of a straight line.
Abstract translation: 提供了一种基板处理装置。 基板处理装置包括第一单元，第二单元，将第一单元连接到第二单元的供应线，以将超临界流体从第一单元供应到第二单元，设置在供给管线中的流量调节构件，以及 设置在供给管线中以除去异物的过滤器。 设置在流量调节构件和过滤器之间的供给管线被设置为脱离直线。
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公开(公告)号：US11655907B2
公开(公告)日：2023-05-23
申请号：US16591441
申请日：2019-10-02
Applicant: SEMES CO., LTD.
Inventor： Yong-Hyun Choi , Ki-Bong Kim , Woo-Young Kim
CPC classification number: F16K17/02 , H01L21/02101
Abstract: A safety valve includes a body having a flow passage formed therein, the flow passage including an inlet an outlet, in which a valve seat is formed around the inlet or the outlet, a disc provided in the body, in which one side of the disc is in contact with the valve seat, an elastic member that is connected to an opposite side of the disc and that elastically supports the disc and has a set elasticity, and a sealing member made of polyimide that is provided on contact surfaces of the disc and the valve seat.
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