发明授权
- 专利标题: Rotational MEMS resonator for oscillator applications
- 专利标题(中): 用于振荡器应用的旋转MEMS谐振器
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申请号: US13828066申请日: 2013-03-14
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公开(公告)号: US09509278B2公开(公告)日: 2016-11-29
- 发明人: Aaron J. Caffee , Jeffrey L. Sonntag , Brian G. Drost , Mehrnaz Motiee
- 申请人: Silicon Laboratories Inc.
- 申请人地址: US TX Austin
- 专利权人: Silicon Laboratories Inc.
- 当前专利权人: Silicon Laboratories Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Abel Law Group, LLP
- 主分类号: H03H9/24
- IPC分类号: H03H9/24 ; H03H9/02 ; H03B5/30
摘要:
An apparatus includes a microelectromechanical system (MEMS) device. The MEMS device includes a resonator suspended from a substrate, an anchor disposed at a center of the resonator, a plurality of suspended beams radiating between the anchor and the resonator, a plurality of first electrodes disposed about the anchor, and a plurality of second electrodes disposed about the anchor. The plurality of first electrodes and the resonator form a first electrostatic transducer. The plurality of second electrodes and the resonator form a second electrostatic transducer. The first electrostatic transducer and the second electrostatic transducer are configured to sustain rotational vibrations of the resonator at a predetermined frequency about an axis through the center of the resonator and orthogonal to a plane of the substrate in response to a signal on the first electrode.
公开/授权文献
- US20140266509A1 ROTATIONAL MEMS RESONATOR FOR OSCILLATOR APPLICATIONS 公开/授权日:2014-09-18
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