Invention Grant
- Patent Title: Rotational MEMS resonator for oscillator applications
- Patent Title (中): 用于振荡器应用的旋转MEMS谐振器
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Application No.: US13828066Application Date: 2013-03-14
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Publication No.: US09509278B2Publication Date: 2016-11-29
- Inventor: Aaron J. Caffee , Jeffrey L. Sonntag , Brian G. Drost , Mehrnaz Motiee
- Applicant: Silicon Laboratories Inc.
- Applicant Address: US TX Austin
- Assignee: Silicon Laboratories Inc.
- Current Assignee: Silicon Laboratories Inc.
- Current Assignee Address: US TX Austin
- Agency: Abel Law Group, LLP
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H03H9/02 ; H03B5/30

Abstract:
An apparatus includes a microelectromechanical system (MEMS) device. The MEMS device includes a resonator suspended from a substrate, an anchor disposed at a center of the resonator, a plurality of suspended beams radiating between the anchor and the resonator, a plurality of first electrodes disposed about the anchor, and a plurality of second electrodes disposed about the anchor. The plurality of first electrodes and the resonator form a first electrostatic transducer. The plurality of second electrodes and the resonator form a second electrostatic transducer. The first electrostatic transducer and the second electrostatic transducer are configured to sustain rotational vibrations of the resonator at a predetermined frequency about an axis through the center of the resonator and orthogonal to a plane of the substrate in response to a signal on the first electrode.
Public/Granted literature
- US20140266509A1 ROTATIONAL MEMS RESONATOR FOR OSCILLATOR APPLICATIONS Public/Granted day:2014-09-18
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