发明授权
- 专利标题: Method and apparatus to apply material to a surface
- 专利标题(中): 将材料施加到表面的方法和装置
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申请号: US13739663申请日: 2013-01-11
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公开(公告)号: US09527107B2公开(公告)日: 2016-12-27
- 发明人: Theodore G. van Kessel , Brent A. Wacaser
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: B05C19/04
- IPC分类号: B05C19/04 ; B05D1/00 ; C23C14/00 ; C23C14/04 ; C23C14/22 ; C23C14/24 ; C23C14/26 ; C23C14/34 ; C23C14/50 ; C23C16/44 ; C23C16/455 ; C23C16/458 ; F16C32/06 ; C23C16/448
摘要:
An apparatus for particle deposition is disclosed. The apparatus includes a housing configured to couple to a work piece to form a chamber. A nozzle directs a working gas into the chamber to deposit a particle entrained in the working gas at the work piece. The nozzle may be coupled to a flow channel within the chamber that directs the working gas through the nozzle. The coupling between the housing and the work piece may be a slidable coupling.
公开/授权文献
- US20140199500A1 METHOD AND APPARATUS TO APPLY MATERIAL TO A SURFACE 公开/授权日:2014-07-17
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