Invention Grant
- Patent Title: Silicon-on-insulator heat sink
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Application No.: US14715693Application Date: 2015-05-19
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Publication No.: US09530711B2Publication Date: 2016-12-27
- Inventor: Alan B. Botula , Alvin J. Joseph , James A. Slinkman , Randy L. Wolf
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/66 ; H01L27/12 ; H01L21/84 ; H01L23/24 ; H01L23/34 ; H01L29/78 ; H01L23/367

Abstract:
An approach for sinking heat from a transistor is provided. A method includes forming a substrate contact extending from a first portion of a silicon-on-insulator (SOI) island to a substrate. The method also includes forming a transistor in a second portion of the SOI island. The method further includes electrically isolating the substrate contact from the transistor by doping the first portion of the SOI island.
Public/Granted literature
- US20150255363A1 SILICON-ON-INSULATOR HEAT SINK Public/Granted day:2015-09-10
Information query
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