Invention Grant
US09530869B2 Methods of forming embedded source/drain regions on finFET devices
有权
在finFET器件上形成嵌入式源极/漏极区域的方法
- Patent Title: Methods of forming embedded source/drain regions on finFET devices
- Patent Title (中): 在finFET器件上形成嵌入式源极/漏极区域的方法
-
Application No.: US14643409Application Date: 2015-03-10
-
Publication No.: US09530869B2Publication Date: 2016-12-27
- Inventor: Murat Kerem Akarvardar , Jody A. Fronheiser , Steven Bentley
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/311 ; H01L21/306 ; H01L21/3105 ; H01L21/02 ; H01L29/78 ; H01L29/08

Abstract:
One illustrative method disclosed herein includes, among other things, forming a layer of insulating material in the source/drain regions of the device, wherein the layer of insulating material has an upper surface that is substantially planar with an upper surface of a gate cap layer, recessing the layer of insulating material such that its recessed upper surface exposes a surface of the fin, performing another etching process to remove at least a portion of the fin and thereby define a recessed fin trench positioned above the recessed fin, and forming an epitaxial semiconductor material that is at least partially positioned in the recessed fin trench.
Public/Granted literature
- US20160268399A1 METHODS OF FORMING EMBEDDED SOURCE/DRAIN REGIONS ON FINFET DEVICES Public/Granted day:2016-09-15
Information query
IPC分类: