Invention Grant
US09552992B2 Co-fabrication of non-planar semiconductor devices having different threshold voltages
有权
具有不同阈值电压的非平面半导体器件的共同制造
- Patent Title: Co-fabrication of non-planar semiconductor devices having different threshold voltages
- Patent Title (中): 具有不同阈值电压的非平面半导体器件的共同制造
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Application No.: US14634483Application Date: 2015-02-27
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Publication No.: US09552992B2Publication Date: 2017-01-24
- Inventor: Hoon Kim , Min-Gyu Sung , Chanro Park , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Wayne F. Reinke, Esq.
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/40 ; H01L21/02

Abstract:
Co-fabricating non-planar (i.e., three-dimensional) semiconductor devices with different threshold voltages includes providing a starting semiconductor structure, the structure including a semiconductor substrate, multiple raised semiconductor structures coupled to the substrate, at least two gate structures encompassing a portion of the raised structures, each gate structure including a gate opening lined with dielectric material and partially filled with work function material, a portion of the work function material being recessed. The co-fabrication further includes creating at least one conformal barrier layer in one or more and less than all of the gate openings, filling the gate openings with conductive material, and modifying the work function of at least one and less than all of the filled gate structures.
Public/Granted literature
- US20160254158A1 CO-FABRICATION OF NON-PLANAR SEMICONDUCTOR DEVICES HAVING DIFFERENT THRESHOLD VOLTAGES Public/Granted day:2016-09-01
Information query
IPC分类: