发明授权
- 专利标题: Linear MRAM device with a self-aligned bottom contact
- 专利标题(中): 具有自对准底部触点的线性MRAM器件
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申请号: US14949267申请日: 2015-11-23
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公开(公告)号: US09553257B1公开(公告)日: 2017-01-24
- 发明人: Anthony J. Annunziata , Michael C. Gaidis , Rohit Kilaru
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: H01L43/02
- IPC分类号: H01L43/02 ; H01L27/22 ; H01L43/08 ; H01L43/12
摘要:
A technique relates to a linear magnetoresistive random access memory (MRAM) device. A linear magnetic tunnel junction structure includes a non-magnetic tunnel barrier on top of a free layer and a reference layer on top of the non-magnetic tunnel barrier, where the linear magnetic tunnel junction structure is in a line. Bottom contacts are separated from one another by a column space while the plurality of bottom contacts are self-aligned to the linear magnetic tunnel junction structure, such that the plurality of bottom contacts are in the line with and underneath the linear magnetic tunnel junction structure. The bottom contacts abut a bottom of the linear magnetic tunnel junction structure. MRAM devices are formed by having non-conducting parts of the free layer isolating individual interfaces between the bottom contacts and the free layer. The MRAM devices are formed in the line of the linear magnetic tunnel junction structure.
公开/授权文献
- US20170005260A1 LINEAR MRAM DEVICE WITH A SELF-ALIGNED BOTTOM CONTACT 公开/授权日:2017-01-05
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