发明授权
- 专利标题： Metal hardmask compositions
- 专利标题（中）： 金属硬掩模组合物
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申请号： US14750180申请日： 2015-06-25
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公开(公告)号： US09562169B2公开(公告)日： 2017-02-07
- 发明人: Deyan Wang , Jibin Sun , Peter Trefonas , Kathleen M. O'Connell
- 申请人： Rohm and Haas Electronic Materials LLC
- 申请人地址： US MA Marlborough
- 专利权人： Rohm and Haas Electronic Materials LLC
- 当前专利权人： Rohm and Haas Electronic Materials LLC
- 当前专利权人地址： US MA Marlborough
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; C08K5/00 ; C09D133/14 ; H01L21/027 ; H01L21/033
摘要：
The invention provides a composition comprising at least the following A and B: A) a polymer comprising, in polymerized from, at least one “monomer that comprises at least one hydroxyl group;” and B) an organometal compound comprising at least one metal selected from Ti, Zr, Hf, Co, Mn, Zn, or combinations thereof, and wherein the organometal compound is present in an amount greater than 5 weight percent, based on the sum weight of A and B.
公开/授权文献
- US20150291829A1 METAL HARDMASK COMPOSITIONS 公开/授权日：2015-10-15
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