Invention Grant
- Patent Title: Long lifetime cold cathode ionization vacuum gauge design
- Patent Title (中): 长寿命冷阴极电离真空计设计
-
Application No.: US14536102Application Date: 2014-11-07
-
Publication No.: US09588004B2Publication Date: 2017-03-07
- Inventor: Gerardo A. Brucker , Scott C. Heinbuch
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L21/34
- IPC: G01L21/34 ; G01L21/32 ; G01L21/30 ; H05B31/26 ; H01J37/04 ; H01J41/02 ; H01J41/06 ; H01J41/00 ; H01J37/08 ; H01J27/00 ; H01J27/02
Abstract:
A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.
Public/Granted literature
- US20160131548A1 LONG LIFETIME COLD CATHODE IONIZATION VACUUM GAUGE DESIGN Public/Granted day:2016-05-12
Information query
