Invention Grant
- Patent Title: Magnetic tunnel junction device
-
Application No.: US14837558Application Date: 2015-08-27
-
Publication No.: US09608198B2Publication Date: 2017-03-28
- Inventor: Shinji Yuasa
- Applicant: Japan Science and Technology Agency , National Institute of Advanced Industrial Science and Technology
- Applicant Address: JP Saitama JP Tokyo
- Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Saitama JP Tokyo
- Agency: Stites & Harbison, PLLC.
- Agent Nicholas Trenkle
- Priority: JP2004-071186 20040312; JP2004-313350 20041028
- Main IPC: H01L43/10
- IPC: H01L43/10 ; H01F10/13 ; G11C11/15 ; H01L49/02 ; H01L27/11507 ; B82Y25/00 ; G11C11/16 ; H01F10/32 ; H01L43/08 ; H01L43/12 ; H01L43/02 ; H01L27/22 ; B82Y10/00

Abstract:
The output voltage of an MRAM is increased by means of an Fe(001)/MgO(001)/Fe(001) MTJ device, which is formed by microfabrication of a sample prepared as follows: A single-crystalline MgO (001) substrate is prepared. An epitaxial Fe(001) lower electrode (a first electrode) is grown on a MgO(001) seed layer at room temperature, followed by annealing under ultrahigh vacuum. A MgO(001) barrier layer is epitaxially formed on the Fe(001) lower electrode (the first electrode) at room temperature, using a MgO electron-beam evaporation. A Fe(001) upper electrode (a second electrode) is then formed on the MgO(001) barrier layer at room temperature. This is successively followed by the deposition of a Co layer on the Fe(001) upper electrode (the second electrode). The Co layer is provided so as to increase the coercive force of the upper electrode in order to realize an antiparallel magnetization alignment.
Public/Granted literature
- US20160020385A1 MAGNETIC TUNNEL JUNCTION DEVICE Public/Granted day:2016-01-21
Information query
IPC分类: