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公开(公告)号:US11233193B2
公开(公告)日:2022-01-25
申请号:US16862598
申请日:2020-04-30
申请人: Japan Science and Technology Agency , National Institute of Advanced Industrial Science and Technology
发明人: Shinji Yuasa
IPC分类号: H01L21/02 , H01L21/00 , H01L43/10 , H01F10/13 , G11C11/15 , H01L49/02 , H01L27/11507 , B82Y25/00 , G11C11/16 , H01L27/22 , H01L43/08 , H01L43/12 , H01F10/32 , H01L43/02 , B82Y10/00
摘要: A method of manufacturing a magnetoresistive random access memory (MRAM). The method includes forming a first CoFeB layer of the MTJ devices, the first CoFeB layer being amorphous and forming a magnesium oxide (MgO) layer of the MTJ devices over the first CoFeB layer. Further, there is a forming of a second CoFeB layer of the MTJ devices, the second CoFeB layer being amorphous over the MgO layer, and annealing the MTJ devices. The first and second CoFeB layers are crystallized by the annealing, and the MgO layer is poly-crystalline in which a (001) crystal plane is preferentially oriented.
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公开(公告)号:US09608198B2
公开(公告)日:2017-03-28
申请号:US14837558
申请日:2015-08-27
申请人: Japan Science and Technology Agency , National Institute of Advanced Industrial Science and Technology
发明人: Shinji Yuasa
IPC分类号: H01L43/10 , H01F10/13 , G11C11/15 , H01L49/02 , H01L27/11507 , B82Y25/00 , G11C11/16 , H01F10/32 , H01L43/08 , H01L43/12 , H01L43/02 , H01L27/22 , B82Y10/00
CPC分类号: H01L43/10 , B82Y10/00 , B82Y25/00 , G11C11/15 , G11C11/16 , G11C11/161 , H01F10/132 , H01F10/3254 , H01L27/11507 , H01L27/22 , H01L27/222 , H01L27/228 , H01L28/55 , H01L43/02 , H01L43/08 , H01L43/12
摘要: The output voltage of an MRAM is increased by means of an Fe(001)/MgO(001)/Fe(001) MTJ device, which is formed by microfabrication of a sample prepared as follows: A single-crystalline MgO (001) substrate is prepared. An epitaxial Fe(001) lower electrode (a first electrode) is grown on a MgO(001) seed layer at room temperature, followed by annealing under ultrahigh vacuum. A MgO(001) barrier layer is epitaxially formed on the Fe(001) lower electrode (the first electrode) at room temperature, using a MgO electron-beam evaporation. A Fe(001) upper electrode (a second electrode) is then formed on the MgO(001) barrier layer at room temperature. This is successively followed by the deposition of a Co layer on the Fe(001) upper electrode (the second electrode). The Co layer is provided so as to increase the coercive force of the upper electrode in order to realize an antiparallel magnetization alignment.
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公开(公告)号:US09123463B2
公开(公告)日:2015-09-01
申请号:US13767290
申请日:2013-02-14
申请人: Japan Science and Technology Agency , National Institute of Advanced Industrial Science and Technology
发明人: Shinji Yuasa
IPC分类号: H01L21/02 , H01L21/00 , G11C11/14 , H01F10/32 , H01F10/13 , G11C11/15 , H01L49/02 , H01L27/115 , B82Y25/00 , G11C11/16 , H01L43/08 , H01L43/12 , H01L43/10 , H01L27/22 , B82Y10/00
CPC分类号: H01L43/10 , B82Y10/00 , B82Y25/00 , G11C11/15 , G11C11/16 , G11C11/161 , H01F10/132 , H01F10/3254 , H01L27/11507 , H01L27/22 , H01L27/222 , H01L27/228 , H01L28/55 , H01L43/02 , H01L43/08 , H01L43/12
摘要: The output voltage of an MRAM is increased by means of an Fe(001)/MgO(001)/Fe(001) MTJ device, which is formed by microfabrication of a sample prepared as follows: A single-crystalline MgO (001) substrate is prepared. An epitaxial Fe(001) lower electrode (a first electrode) is grown on a MgO(001) seed layer at room temperature, followed by annealing under ultrahigh vacuum. A MgO(001) barrier layer is epitaxially formed on the Fe(001) lower electrode (the first electrode) at room temperature, using a MgO electron-beam evaporation. A Fe(001) upper electrode (a second electrode) is then formed on the MgO(001) barrier layer at room temperature. This is successively followed by the deposition of a Co layer on the Fe(001) upper electrode (the second electrode). The Co layer is provided so as to increase the coercive force of the upper electrode in order to realize an antiparallel magnetization alignment.
摘要翻译: 通过以下制备的样品的微细加工形成的Fe(001)/ MgO(001)/ Fe(001)MTJ器件,MRAM的输出电压增加:单晶MgO(001)衬底 准备好了 外延Fe(001)下电极(第一电极)在室温下在MgO(001)晶种层上生长,然后在超高真空下进行退火。 使用MgO电子束蒸发,在室温下在Fe(001)下电极(第一电极)上外延形成MgO(001)势垒层。 然后在室温下在MgO(001)阻挡层上形成Fe(001)上电极(第二电极)。 随后在Fe(001)上电极(第二电极)上沉积Co层。 提供Co层以增加上电极的矫顽力,以实现反平行的磁化对准。
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公开(公告)号:US10367138B2
公开(公告)日:2019-07-30
申请号:US15428842
申请日:2017-02-09
申请人: Japan Science and Technology Agency , National Institute of Advanced Industrial Science and Technology
发明人: Shinji Yuasa
IPC分类号: H01L21/02 , H01L21/00 , H01L43/10 , H01F10/13 , G11C11/15 , H01L49/02 , H01L27/11507 , B82Y25/00 , G11C11/16 , H01F10/32 , H01L27/22 , H01L43/08 , H01L43/12 , H01L43/02 , B82Y10/00
摘要: The output voltage of an MRAM is increased by means of an Fe(001)/MgO(001)/Fe(001) MTJ device, which is formed by microfabrication of a sample prepared as follows: A single-crystalline MgO (001) substrate is prepared. An epitaxial Fe(001) lower electrode (a first electrode) is grown on a MgO(001) seed layer at room temperature, followed by annealing under ultrahigh vacuum. A MgO(001) barrier layer is epitaxially formed on the Fe(001) lower electrode (the first electrode) at room temperature, using a MgO electron-beam evaporation. A Fe(001) upper electrode (a second electrode) is then formed on the MgO(001) barrier layer at room temperature. This is successively followed by the deposition of a Co layer on the Fe(001) upper electrode (the second electrode). The Co layer is provided so as to increase the coercive force of the upper electrode in order to realize an antiparallel magnetization alignment.
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公开(公告)号:US10680167B2
公开(公告)日:2020-06-09
申请号:US16443875
申请日:2019-06-18
申请人: Japan Science and Technology Agency , National Institute of Advanced Industrial Science and Technology
发明人: Shinji Yuasa
IPC分类号: H01L21/02 , H01L21/00 , H01L43/10 , H01F10/13 , G11C11/15 , H01L49/02 , H01L27/11507 , B82Y25/00 , G11C11/16 , H01L27/22 , H01L43/08 , H01L43/12 , H01F10/32 , H01L43/02 , B82Y10/00
摘要: The output voltage of an MRAM is increased by means of an Fe(001)/MgO(001)/Fe(001) MTJ device, which is formed by microfabrication of a sample prepared as follows: A single-crystalline MgO (001) substrate is prepared. An epitaxial Fe(001) lower electrode (a first electrode) is grown on a MgO(001) seed layer at room temperature, followed by annealing under ultrahigh vacuum. A MgO(001) barrier layer is epitaxially formed on the Fe(001) lower electrode (the first electrode) at room temperature, using a MgO electron-beam evaporation. A Fe(001) upper electrode (a second electrode) is then formed on the MgO(001) barrier layer at room temperature. This is successively followed by the deposition of a Co layer on the Fe(001) upper electrode (the second electrode). The Co layer is provided so as to increase the coercive force of the upper electrode in order to realize an antiparallel magnetization alignment.
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公开(公告)号:US20150280111A1
公开(公告)日:2015-10-01
申请号:US14423978
申请日:2013-08-27
发明人: Shinji Yuasa , Takayuki Nozaki
摘要: A magnetic multilayer film, includes a nonmagnetic layer including a single- or poly-crystalline magnesium oxide in which a (001) crystal plane is preferentially oriented, a very thin layer including an oxide of a 3d transition metal element, and a very thin ferromagnetic layer, laminated in sequence starting on a substrate side.
摘要翻译: 磁性多层膜包括非磁性层,其包括其中(001)晶面优先取向的单晶或多晶氧化镁,包括3d过渡金属元素的氧化物的非常薄的层,以及非常薄的铁磁性 层,从衬底侧开始层叠。
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公开(公告)号:US11031062B2
公开(公告)日:2021-06-08
申请号:US16603343
申请日:2018-04-04
发明人: Yoichi Shiota , Takayuki Nozaki , Shinji Yuasa
摘要: According to one embodiment, a magnetic memory device includes a stacked body and a controller. The stacked body includes a first conductive layer, a second conductive layer, a first magnetic layer provided between the first conductive layer and the second conductive layer, a second magnetic layer provided between the first magnetic layer and the second conductive layer, and a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer. A resistance value per unit area of the nonmagnetic layer exceeds 20 Ωμm2. The controller is electrically connected to the first conductive layer and the second conductive layer, and supplies a write pulse to the stacked body in a first operation. The write pulse includes a rise period, a potential of the write pulse changing from a first potential toward a second potential in the rise period, an intermediate period of the second potential after the rise period, and a fall period after the intermediate period, the potential of the write pulse changing from the second potential toward the first potential in the fall period. A duration of the fall period is longer than a duration of the rise period.
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公开(公告)号:US10388347B2
公开(公告)日:2019-08-20
申请号:US15576271
申请日:2016-05-19
发明人: Rie Matsumoto , Hiroko Arai , Shinji Yuasa , Hiroshi Imamura
摘要: Some embodiments are directed to a non-collinear magnetoresistive device, including a free layer; a fixed layer; and a non-magnetic layer disposed between the free layer and the fixed layer, wherein the fixed layer has an easy magnetization direction in an in-plane direction or in a perpendicular direction, the free layer satisfies at room temperature expressions (1) and (2) below: ERT≥1.66×10−19 J (1) V≤5×104 nm3 (2) where ERT=(Ku1,eff+Ku2+Ku1,eff2/4Ku2)×V, Ku1,eff: an effective first-order anisotropy constant, Ku2: a second-order anisotropy constant, and V: a volume, and wherein the free layer is in a cone magnetization state.
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公开(公告)号:US20180302035A1
公开(公告)日:2018-10-18
申请号:US15569500
申请日:2016-04-27
发明人: Shingo Tamaru , Hitoshi Kubota , Akio Fukushima , Shinji Yuasa
CPC分类号: H03B15/006 , H01F10/3259 , H01L29/82 , H01L43/02 , H01L43/08 , H01L43/10 , H03B15/00 , H03L7/093 , H03L7/099 , H03L7/18
摘要: The present invention provides a high-frequency phase-locked oscillation circuit having an extremely narrow peak width and a stable frequency so that a high-frequency wave that is oscillated by the MR element solves a problem of a large peak width of oscillation spectrum. The high-frequency phase-locked oscillation circuit is achieved by providing: a magnetoresistive element 6 that oscillates a high-frequency wave with an oscillating frequency fout; a reference signal source 1 that outputs a reference signal with a reference frequency fref; a phase-locked loop circuit having a phase comparator 3, a loop filer 4, and a frequency divider 9; an adder 5 that adds a phase error signal A output from the loop filter and a bias voltage B for oscillating the high-frequency wave from the magnetoresistive element, and that inputs an added bias voltage (A+B) to the magnetoresistive element 6; and a filter 7 provided between the frequency divider 9 and the magnetoresistive element 6 in a region closer to an input side of the frequency divider 9, the filter cutting off the reference frequency fref while allowing the oscillating frequency fout to pass through the filter.
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公开(公告)号:US10998490B2
公开(公告)日:2021-05-04
申请号:US16606927
申请日:2018-04-05
发明人: Rie Matsumoto , Takayuki Nozaki , Shinji Yuasa , Hiroshi Imamura
摘要: A magnetic element includes a first magnetic layer and a first nonmagnetic layer. An angle θ0 between a first direction and the magnetization direction of the first magnetic layer satisfies 0°
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