- 专利标题: Semiconductor device
-
申请号: US14872868申请日: 2015-10-01
-
公开(公告)号: US09613884B2公开(公告)日: 2017-04-04
- 发明人: Chi Hoon Jun , Jeho Na , Dong Yun Jung , Sang Choon Ko , Eun Soo Nam , Hyung Seok Lee
- 申请人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 申请人地址: KR Daejeon
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2015-0029809 20150303
- 主分类号: H01L23/34
- IPC分类号: H01L23/34 ; H01L23/467
摘要:
Provided is a semiconductor device. The semiconductor device includes a substrate including a cantilever configured to generate a flow of cooling media through dynamic movement, an active area on the substrate which an electronic device is provided on, an insulation layer disposed to be spaced apart from the active area on the substrate, a lower electrode on the insulation layer, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film.
公开/授权文献
- US20160260653A1 SEMICONDUCTOR DEVICE 公开/授权日:2016-09-08
信息查询
IPC分类: