Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
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Application No.: US15144662Application Date: 2016-05-02
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Publication No.: US09627542B2Publication Date: 2017-04-18
- Inventor: Byoung-Ho Kwon , Cheol Kim , Ho-Young Kim , Se-Jung Park , Myeong-Cheol Kim , Bo-Kyeong Kang , Bo-Un Yoon , Jae-Kwang Choi , Si-Young Choi , Suk-Hoon Jeong , Geum-Jung Seong , Hee-Don Jeong , Yong-Joon Choi , Ji-Eun Han
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2013-0093690 20130807
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/088 ; H01L21/8234 ; H01L29/66 ; H01L21/306 ; H01L21/3065 ; H01L21/308 ; H01L29/423 ; H01L21/84 ; H01L27/12 ; H01L21/8238 ; H01L29/49

Abstract:
Semiconductor devices may include a semiconductor substrate with a first semiconductor fin aligned end-to-end with a second semiconductor with a recess between facing ends of the first and second semiconductor fins. A first insulator pattern is formed adjacent sidewalls of the first and second semiconductor fins and a second insulator pattern is formed within the first recess. The second insulator pattern may have a top surface higher than a top surface of the first insulator pattern, such as to the height of the top surface of the fins (or higher or lower). First and second gates extend along sidewalls and a top surface of the first semiconductor fin. A dummy gate electrode may be formed on the top surface of the second insulator. Methods for manufacture of the same and modifications are also disclosed.
Public/Granted literature
- US20160247925A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2016-08-25
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