Invention Grant
- Patent Title: Semiconductor devices having tapered active regions
-
Application No.: US15046455Application Date: 2016-02-18
-
Publication No.: US09634092B2Publication Date: 2017-04-25
- Inventor: Krishna Kumar Bhuwalka , Zhenhua Wu , Uihui Kwon , Keunho Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2015-0027476 20150226
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L29/775 ; H01L29/778 ; H01L29/78 ; H01L29/786 ; H01L29/10 ; H01L29/417

Abstract:
Provided is a finFET device. The finFET device may include an active region which protrudes vertically from a substrate, a channel region disposed on a center of the active region, a drain region disposed on one side surface of the channel region, and a source region disposed on the other side surface of the channel region, a gate insulating layer formed on two opposing side surfaces of the channel region and having a U-shaped cross-section, gate spacers formed on outer surfaces of the gate insulating layer, drain spacers formed on two opposing side surfaces of the drain region, and source spacers formed on two opposing side surfaces of the source region, and at least one of the two side surfaces of the drain region has a tapered part.
Public/Granted literature
- US20160254348A1 SEMICONDUCTOR DEVICES HAVING TAPERED ACTIVE REGIONS Public/Granted day:2016-09-01
Information query
IPC分类: