Semiconductor devices having tapered active regions
Abstract:
Provided is a finFET device. The finFET device may include an active region which protrudes vertically from a substrate, a channel region disposed on a center of the active region, a drain region disposed on one side surface of the channel region, and a source region disposed on the other side surface of the channel region, a gate insulating layer formed on two opposing side surfaces of the channel region and having a U-shaped cross-section, gate spacers formed on outer surfaces of the gate insulating layer, drain spacers formed on two opposing side surfaces of the drain region, and source spacers formed on two opposing side surfaces of the source region, and at least one of the two side surfaces of the drain region has a tapered part.
Public/Granted literature
Information query
Patent Agency Ranking
0/0