Invention Grant
- Patent Title: Bonding method, bonding apparatus, and method for manufacturing substrate
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Application No.: US14261489Application Date: 2014-04-25
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Publication No.: US09640507B2Publication Date: 2017-05-02
- Inventor: Ilyoung Han , Kyoungran Kim , Donggil Shim , Youngjoo Lee , Byunggon Kim , Byeongkap Choi
- Applicant: Ilyoung Han , Kyoungran Kim , Donggil Shim , Youngjoo Lee , Byunggon Kim , Byeongkap Choi
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2013-0099766 20130822
- Main IPC: B32B41/00
- IPC: B32B41/00 ; H01L23/00 ; H01L21/67 ; H01L21/677 ; H01L25/065 ; H01L25/00 ; H01L21/66 ; H01L25/18

Abstract:
A bonding method for bonding a semiconductor chip to an underlying structure includes aligning an electrical contact of a lower surface of the semiconductor chip with an electrical connection member of an upper surface of the underlying structure, the electrical contact at least partially encased by a support material. The method further includes first heating the semiconductor chip and the underlying structure, deforming the electrical contact, and curing the support material encasing the deformed electrical contact. The method still further includes second heating the semiconductor chip and the underlying structure to bond the electrical contact of the semiconductor chip to the electrical connection member of the underlying structure while maintaining the support material in a cured state.
Public/Granted literature
- US20150053350A1 BONDING METHOD, BONDING APPARATUS, AND METHOD FOR MANUFACTURING SUBSTRATE Public/Granted day:2015-02-26
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