Invention Grant
- Patent Title: Workpiece dividing method
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Application No.: US13871125Application Date: 2013-04-26
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Publication No.: US09649775B2Publication Date: 2017-05-16
- Inventor: Satoshi Kumazawa
- Applicant: Disco Corporation
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP2012-107974 20120509
- Main IPC: B26D9/00
- IPC: B26D9/00 ; B23K26/42 ; B23K26/36 ; B23K26/00 ; B23K26/364 ; B23K26/60 ; B23K26/40 ; H01L33/00 ; B23K103/00

Abstract:
A workpiece dividing method for dividing a platelike workpiece into a plurality of individual chips. The workpiece dividing method includes a workpiece preparing step of preparing the platelike workpiece, at least one side of the workpiece being formed as a mat surface, a holding step of holding the workpiece on a holding surface of a chuck table in the condition where the mat surface of the workpiece is exposed, a cut groove forming step of cutting the mat surface of the workpiece held on the holding surface of the chuck table by using a cutting blade to thereby form a cut groove with a remaining portion, and a laser cutting step of applying a laser beam to the workpiece along the cut groove to thereby cut the remaining portion.
Public/Granted literature
- US20130298744A1 WORKPIECE DIVIDING METHOD Public/Granted day:2013-11-14
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