Invention Grant
- Patent Title: Vibration device including support portion
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Application No.: US14475487Application Date: 2014-09-02
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Publication No.: US09650238B2Publication Date: 2017-05-16
- Inventor: In Bok Baek , Han Young Yu , Yark Yeon Kim , Young Jun Kim , Chang Geun Ahn , Yong Sun Yoon , Bong Kuk Lee , Ji Eun Lim , Won Ick Jang
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2013-0105708 20130903; KR10-2014-0097114 20140730
- Main IPC: B81B7/02
- IPC: B81B7/02 ; B81C1/00 ; B81B7/00 ; H03H3/007 ; H03H9/08 ; H03H9/24 ; H02N11/00
Abstract:
A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region.
Public/Granted literature
- US20150061455A1 VIBRATION DEVICE AND METHOD OF MANUFACTURING VIBRATION DEVICE Public/Granted day:2015-03-05
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