Invention Grant
- Patent Title: Pre-treatment method for plating and storage medium
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Application No.: US14548794Application Date: 2014-11-20
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Publication No.: US09653350B2Publication Date: 2017-05-16
- Inventor: Takashi Tanaka , Nobutaka Mizutani , Yusuke Saito , Mitsuaki Iwashita
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2013-241080 20131121
- Main IPC: B05D3/00
- IPC: B05D3/00 ; H01L21/768 ; C23C18/18 ; B05D3/02 ; B05D3/10 ; C23C18/40 ; C23C18/48

Abstract:
Catalytic metal nanoparticles can be attached on a base. A pre-treatment method for plating includes a catalytic particle-containing film forming process of forming a catalytic particle-containing film on a surface of a substrate by supplying, onto the substrate, a catalytic particle solution which is prepared by dispersing the catalytic metal nanoparticles and a dispersing agent in a solvent containing water; a first heating process of removing moisture contained at least in the catalytic particle-containing film by heating the substrate to a first temperature; and a second heating process of polymerizing the dispersing agent to have a sheet shape by heating the substrate to a second temperature higher than the first temperature after the first heating process and fixing the catalytic metal nanoparticles on a base layer by covering the catalytic metal nanoparticles with the sheet-shaped dispersing agent.
Public/Granted literature
- US20150140816A1 PRE-TREATMENT METHOD FOR PLATING AND STORAGE MEDIUM Public/Granted day:2015-05-21
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