Method for manufacturing semiconductor element

Invention Grant

US09653644B2 Method for manufacturing semiconductor element 有权

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Patent Title: Method for manufacturing semiconductor element
Application No.: US15279811

Application Date: 2016-09-29
Publication No.: US09653644B2

Publication Date: 2017-05-16
Inventor: Hiroaki Tamemoto , Ryota Taoka
Applicant: NICHIA CORPORATION
Applicant Address: JP Anan-shi
Assignee: NICHIA CORPORATION
Current Assignee: NICHIA CORPORATION
Current Assignee Address: JP Anan-shi
Agency: Global IP Counselors, LLP
Priority: JP2015-196595 20151002
Main IPC: H01L21/786
IPC: H01L21/786 ; B23K26/50 ; B23K26/53 ; H01L33/00 ; H01L33/06 ; H01L33/32 ; H01L33/42 ; B23K26/00 ; B23K101/40

Method for manufacturing semiconductor element

Abstract:

A method for manufacturing a semiconductor element includes providing a wafer having a sapphire substrate and a semiconductor stacked body disposed on the sapphire substrate, performing a first scanning of a portion of the sapphire substrate in which a laser beam is irradiated into an interior of the sapphire substrate, performing a second scanning of the portion of the sapphire substrate in which a laser beam is irradiated into the interior of the sapphire substrate, the second scanning occurring after the first scanning and before a void is produced in the interior of the sapphire substrate irradiated with the laser beam in the first scanning, and separating the wafer into a plurality of semiconductor elements.

Public/Granted literature

US20170098733A1 METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT Public/Granted day:2017-04-06

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/70	.由在一共用基片内或其上形成的多个固态组件或集成电路组成的器件或其部件的制造或处理；集成电路器件或其特殊部件的制造（由预制电组件组成的组装件的制造入H05K3/00，H05K13/00）
H01L21/77	..在公共衬底中或上面形成的由许多固态元件或集成电路组成的器件的制造或处理（电可编程只读存储器或其多步骤的制造方法入H01L27/115）
H01L21/78	...把衬底连续地分成多个独立的器件（改变表面物理特性或者半导体形状的切割入H01L21/304）
H01L21/782	....制造多个器件，每一个由单个电路元件组成（H01L21/82优先）
H01L21/786	.....衬底是非半导体的，例如绝缘体