- 专利标题: Handler apparatus, adjustment method of handler apparatus, and test apparatus
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申请号: US14472388申请日: 2014-08-29
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公开(公告)号: US09658287B2公开(公告)日: 2017-05-23
- 发明人: Tsuyoshi Yamashita , Mitsunori Aizawa , Hiromitsu Horino , Yuya Yamada , Masataka Onozawa
- 申请人: ADVANTEST CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: ADVANTEST CORPORATION
- 当前专利权人: ADVANTEST CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: KR2014-0034379 20140325
- 主分类号: G01R31/20
- IPC分类号: G01R31/20 ; G01R31/28 ; G01C11/00 ; G01R1/04
摘要:
A handler apparatus adjusts a position of an actuator and enhances positional accuracy of a device under test. Provided is a handler apparatus that conveys a device under test to a test socket, including: an actuator that, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder; and an actuator adjusting section that adjusts an amount of driving of the actuator by causing the actuator to fit an actuator fitting unit.
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