- Patent Title: Image creating method and imaging system for performing the same
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Application No.: US14963654Application Date: 2015-12-09
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Publication No.: US09659743B2Publication Date: 2017-05-23
- Inventor: Jung-Hwan Kim , Min-Kook Kim , Yu-Sin Yang , Sang-Kil Lee , Chung-Sam Jun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C
- Priority: KR10-2014-0182994 20141218
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/21 ; H01J37/285 ; H01J37/31
Abstract:
A spatial image having 2D spatial information is obtained from a surface of a sample by an image creating method. The surface of the sample is milled to obtain an elemental image having material information from the milled surface. The spatial image and the elemental image are composed to form a 2D spatial/elemental image.
Public/Granted literature
- US20160181061A1 IMAGE CREATING METHOD AND IMAGING SYSTEM FOR PERFORMING THE SAME Public/Granted day:2016-06-23
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