Invention Grant
- Patent Title: Logic chip including embedded magnetic tunnel junctions
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Application No.: US13994715Application Date: 2013-03-15
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Publication No.: US09660181B2Publication Date: 2017-05-23
- Inventor: Kevin J. Lee , Tahir Ghani , Joseph M. Steigerwald , John H. Epple , Yih Wang
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- International Application: PCT/US2013/031994 WO 20130315
- International Announcement: WO2014/142956 WO 20140918
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/08 ; H01L27/22

Abstract:
An embodiment integrates memory, such as spin-torque transfer magnetoresistive random access memory (STT-MRAM) within a logic chip. The STT-MRAM includes a magnetic tunnel junction (MTJ) that has an upper MTJ layer, a lower MTJ layer, and a tunnel barrier directly contacting the upper MTJ layer and the lower MTJ layer; wherein the upper MTJ layer includes an upper MTJ layer sidewall and the lower MTJ layer includes a lower MTJ sidewall horizontally offset from the upper MTJ layer. Another embodiment includes a memory area, comprising a MTJ, and a logic area located on a substrate; wherein a horizontal plane intersects the MTJ, a first Inter-Layer Dielectric (ILD) material adjacent the MTJ, and a second ILD material included in the logic area, the first and second ILD materials being unequal to one another. Other embodiments are described herein.
Public/Granted literature
- US20140264668A1 LOGIC CHIP INCLUDING EMBEDDED MAGNETIC TUNNEL JUNCTIONS Public/Granted day:2014-09-18
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