- 专利标题: Memory device and method of manufacturing the same
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申请号: US14918567申请日: 2015-10-21
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公开(公告)号: US09666570B2公开(公告)日: 2017-05-30
- 发明人: Bo-Lun Wu , Chia-Hua Ho , Ting-Ying Shen , Meng-Hung Lin
- 申请人: Winbond Electronics Corp.
- 申请人地址: TW Taichung
- 专利权人: Winbond Electronics Corp.
- 当前专利权人: Winbond Electronics Corp.
- 当前专利权人地址: TW Taichung
- 代理机构: Jiang Chyun IP Office
- 优先权: CN201510415026 20150715
- 主分类号: H01L25/18
- IPC分类号: H01L25/18 ; H01L27/02 ; H01L27/105 ; H01L45/00 ; H01L27/24
摘要:
The invention provides a memory device and a manufacturing method thereof. The memory device includes a substrate, a capacitor, a protection device, a first metal interconnect, and a second metal interconnect. The capacitor is located on the substrate of a first region. The protection device is located in the substrate of a second region. The capacitor includes a plurality of bottom electrodes, a top electrode, and a capacitor dielectric layer. The top electrode has a first portion and a second portion, wherein the second portion is extended to the second region. The capacitor dielectric layer is located between the bottom electrodes and the top electrode. The first metal interconnect is located between the capacitor and the substrate. The second metal interconnect is located between the second portion of the top electrode and the protection device. The top electrode is electrically connected to the protection device through the second metal interconnect.
公开/授权文献
- US20170018709A1 MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2017-01-19
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