Invention Grant
- Patent Title: Microelectromechanical system microphone
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Application No.: US14630620Application Date: 2015-02-24
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Publication No.: US09668064B2Publication Date: 2017-05-30
- Inventor: Chang-Sheng Hsu , Yuan-Sheng Lin , Wei-Hua Fang , Kuan-Yu Wang , Yan-Da Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Priority: CN201510019327 20150115
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H04R23/00

Abstract:
A microelectromechanical system microphone includes a semiconductor-on-insulator structure, a plurality of resistors, a plurality of first openings, and a vent hole. The semiconductor-on-insulator structure includes a substrate, an insulating layer and a semiconductor layer. The resistors are formed in the semiconductor layer, the first openings are formed in the semiconductor layer, and the vent hole is formed in the insulating layer and the substrate. The resistors are connected to each other to form a resistor pattern, and the first openings are all formed within the resistor pattern.
Public/Granted literature
- US20160212551A1 MICROELECTROMECHANICAL SYSTEM MICROPHONE Public/Granted day:2016-07-21
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