- 专利标题: Micro pick up array pivot mount design for strain amplification
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申请号: US14503065申请日: 2014-09-30
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公开(公告)号: US09705432B2公开(公告)日: 2017-07-11
- 发明人: Stephen P. Bathurst , Paul Argus Parks , Nile Alexander Light
- 申请人: LuxVue Technology Corporation
- 申请人地址: US CA Cupertino
- 专利权人: Apple Inc.
- 当前专利权人: Apple Inc.
- 当前专利权人地址: US CA Cupertino
- 代理机构: Blakely Sokoloff Taylor & Zafman LLP
- 主分类号: H02N13/00
- IPC分类号: H02N13/00 ; H01L21/683 ; B81C99/00
摘要:
Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes primary spring arms and secondary spring arms extending between a pivot platform and a base of the pivot mount. The secondary spring arms are characterized by a lower stiffness than the primary spring arms, and strain sensing elements are located along the secondary spring arms.
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