Mass transfer tool manipulator assembly with remote center of compliance
    1.
    发明授权
    Mass transfer tool manipulator assembly with remote center of compliance 有权
    质量传递工具机械手组装与远程中心的合规

    公开(公告)号:US09522468B2

    公开(公告)日:2016-12-20

    申请号:US14273298

    申请日:2014-05-08

    Abstract: Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

    Abstract translation: 公开了用于将微器件或微阵列阵列转移到衬底或从衬底传送微阵列的系统和方法。 在一个实施例中,远程中心机器人允许微拾取阵列和目标基板之间的即时对准。 远程中心机器人可以包括独立移动并共享远程旋转中心的多个对称联动。 在一个实施例中,远程旋转中心可以定位在微拾取阵列的表面处,以防止在传送期间损坏微器件阵列。

    MASS TRANSFER TOOL MANIPULATOR ASSEMBLY WITH REMOTE CENTER OF COMPLIANCE
    4.
    发明申请
    MASS TRANSFER TOOL MANIPULATOR ASSEMBLY WITH REMOTE CENTER OF COMPLIANCE 有权
    具有远程符合性中心的大量传送工具操纵器组件

    公开(公告)号:US20150321338A1

    公开(公告)日:2015-11-12

    申请号:US14273298

    申请日:2014-05-08

    Abstract: Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

    Abstract translation: 公开了用于将微器件或微阵列阵列转移到衬底或从衬底传送微阵列的系统和方法。 在一个实施例中,远程中心机器人允许微拾取阵列和目标基板之间的即时对准。 远程中心机器人可以包括独立移动并共享远程旋转中心的多个对称联动。 在一个实施例中,远程旋转中心可以定位在微拾取阵列的表面处,以防止在传送期间损坏微器件阵列。

    MICRO PICK UP ARRAY PIVOT MOUNT DESIGN FOR STRAIN AMPLIFICATION
    5.
    发明申请
    MICRO PICK UP ARRAY PIVOT MOUNT DESIGN FOR STRAIN AMPLIFICATION 有权
    微型拾取阵列装置设计用于应变放大

    公开(公告)号:US20160094161A1

    公开(公告)日:2016-03-31

    申请号:US14503065

    申请日:2014-09-30

    CPC classification number: H02N13/00 B81C99/002 H01L21/6833

    Abstract: Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes primary spring arms and secondary spring arms extending between a pivot platform and a base of the pivot mount. The secondary spring arms are characterized by a lower stiffness than the primary spring arms, and strain sensing elements are located along the secondary spring arms.

    Abstract translation: 公开了用于将转印头组件与衬底对准的系统和方法。 在一个实施例中,枢轴安装件用于在闭环运动控制系统中产生反馈信号。 在一个实施例中,枢轴支架包括在枢转平台和枢转支架的基部之间延伸的主弹簧臂和次弹簧臂。 次级弹簧臂的特征在于比主弹簧臂更低的刚度,并且应变感测元件沿着次级弹簧臂定位。

    MICRO PICK UP ARRAY PIVOT MOUNT WITH INTEGRATED STRAIN SENSING ELEMENTS
    6.
    发明申请
    MICRO PICK UP ARRAY PIVOT MOUNT WITH INTEGRATED STRAIN SENSING ELEMENTS 有权
    微型拾取阵列装置与集成的应变感应元件

    公开(公告)号:US20150360940A1

    公开(公告)日:2015-12-17

    申请号:US14303483

    申请日:2014-06-12

    Abstract: Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.

    Abstract translation: 公开了用于将转印头组件与衬底对准的系统和方法。 在一个实施例中,枢轴安装件用于在闭环运动控制系统中产生反馈信号。 在一个实施例中,枢轴支架包括多个弹簧臂,每个弹簧臂包括沿着弹簧臂的轴向长度的开关,使得弹簧臂的一对第一和第二长度紧邻开关 - 背部并且彼此平行。 第一应变传感元件位于第一长度,并且第二应变感测元件位于第二长度。

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