Invention Grant
- Patent Title: System and method for separation of pump light and collected light in a laser pumped light source
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Application No.: US14459095Application Date: 2014-08-13
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Publication No.: US09709811B2Publication Date: 2017-07-18
- Inventor: Anatoly Shchemelinin , Ilya Bezel , Matthew Panzer , Eugene Shifrin
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G02B27/10
- IPC: G02B27/10

Abstract:
A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.
Public/Granted literature
- US20150049778A1 System and Method for Separation of Pump Light and Collected Light in a Laser Pumped Light Source Public/Granted day:2015-02-19
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