Invention Grant
- Patent Title: Chemical mechanical polishing slurry
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Application No.: US14723488Application Date: 2015-05-28
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Publication No.: US09718991B2Publication Date: 2017-08-01
- Inventor: Yi Han Yang , Wen Cheng Liu , Ming Che Ho , Ming Hui Lu , Song Yuan Chang
- Applicant: UWiZ Technology Co., Ltd.
- Applicant Address: TW Taoyuan
- Assignee: UWIZ TECHNOLOGY CO., LTD.
- Current Assignee: UWIZ TECHNOLOGY CO., LTD.
- Current Assignee Address: TW Taoyuan
- Agency: JMB Davis Ben-David
- Priority: TW104103884A 20150205
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09K3/14

Abstract:
A chemical mechanical polishing slurry for polishing a stainless steel substrate is provided, which comprises a content 10˜50 wt % of abrasive particles, a content 0.001˜2.0 wt % of a coolant, a content 0.001˜1.0 wt % of an oxidant, a content 10˜5000 ppm of a lubricity improver, and a content 10˜5000 ppm of a foam inhibitor. A particle size of the abrasive particles is in a range of 20˜500 nm. The alkaline polishing slurry according to the present invention is capable of increasing the polishing performance, surface quality, and surface passivation effect after the chemical-mechanical polishing process.
Public/Granted literature
- US20160347971A1 CHEMICAL MECHANICAL POLISHING SLURRY Public/Granted day:2016-12-01
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