- 专利标题: Photoresist composition, compound, and production method thereof
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申请号: US15252553申请日: 2016-08-31
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公开(公告)号: US09720322B2公开(公告)日: 2017-08-01
- 发明人: Hayato Namai , Norihiko Ikeda , Takanori Kawakami
- 申请人: JSR CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: JSR CORPORATION
- 当前专利权人: JSR CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2012-062856 20120319; JP2012-180604 20120816
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C07C381/12 ; C07D307/93 ; C07D307/94 ; C07D311/74 ; C07D313/06 ; C07D317/24 ; C07D319/06 ; C07D321/12 ; C07D327/04 ; C07C309/17 ; C07D237/04 ; C07D237/16 ; C07D493/10 ; C07D207/416 ; C07D211/46 ; C07D295/18 ; C07D307/33 ; C07D307/64 ; C07C309/27 ; G03F7/039 ; G03F7/11 ; G03F7/20 ; G03F7/027 ; G03F7/038 ; C07C309/18 ; C07D295/185 ; C07D307/60 ; C07D311/20
摘要:
A photoresist composition containing (A) a polymer having a structural unit (I) that includes an acid-labile group, and (I) a compound represented by the following formula (1). In the following formula (1), R1, R2, R3 and R represent a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. X represents a single bond, an oxygen atom or —NRa—. Ra represents a hydrogen atom, a hydroxy group or a monovalent organic group having 1 to 20 carbon atoms, and optionally taken together represents a ring structure by binding with R each other. A− represents —SO3− or —CO2−. M+ represents a monovalent onium cation.
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