Invention Grant
- Patent Title: Etching method and etching apparatus
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Application No.: US14785392Application Date: 2014-05-21
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Publication No.: US09728418B2Publication Date: 2017-08-08
- Inventor: Keigo Toyoda , Masaru Isago , Hiroshi Tsujimoto
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2013-107878 20130522
- International Application: PCT/JP2014/063505 WO 20140521
- International Announcement: WO2014/189087 WO 20141127
- Main IPC: H01L21/3065
- IPC: H01L21/3065 ; H01L21/683 ; H01L21/67 ; H01L21/66 ; H01J37/32 ; H01L21/311

Abstract:
An etching method for performing a plasma etching on an object to be processed by using a supplied gas is provided. In the etching method, a temperature of a focus ring is adjusted by using a first temperature adjustment mechanism controllable independently of a temperature control of the object to be processed while measuring a time variation until the temperature of the focus ring reaches a target value. A degree of consumption of the focus ring is estimated from the measured time variation based on a preliminarily set correlation between the time variation and the degree of consumption of the focus ring. The target value of the temperature of the focus ring is corrected based on the estimated degree of consumption of the focus ring.
Public/Granted literature
- US20160079074A1 ETCHING METHOD AND ETCHING APPARATUS Public/Granted day:2016-03-17
Information query
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