发明授权
- 专利标题: Semiconductor device and method of forming ultra thin multi-die face-to-face WLCSP
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申请号: US12786008申请日: 2010-05-24
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公开(公告)号: US09735113B2公开(公告)日: 2017-08-15
- 发明人: HeeJo Chi , NamJu Cho , JunWoo Myung
- 申请人: HeeJo Chi , NamJu Cho , JunWoo Myung
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L25/065
- IPC分类号: H01L25/065 ; H01L21/60 ; H01L23/538 ; H01L21/48 ; H01L21/56 ; H01L21/683 ; H01L23/552 ; H05K1/18 ; H01L23/31 ; H01L23/367 ; H01L23/498 ; H01L23/00 ; H05K3/00 ; H05K3/42
摘要:
A semiconductor device has a first semiconductor die stacked over a second semiconductor die which is mounted to a temporary carrier. A plurality of bumps is formed over an active surface of the first semiconductor die around a perimeter of the second semiconductor die. An encapsulant is deposited over the first and second semiconductor die and carrier. A plurality of conductive vias is formed through the encapsulant around the first and second semiconductor die. A portion of the encapsulant and a portion of a back surface of the first and second semiconductor die is removed. An interconnect structure is formed over the encapsulant and the back surface of the first or second semiconductor die. The interconnect structure is electrically connected to the conductive vias. The carrier is removed. A heat sink or shielding layer can be formed over the encapsulant and first semiconductor die.
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