Invention Grant
- Patent Title: Dual liner CMOS integration methods for FinFET devices
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Application No.: US14828652Application Date: 2015-08-18
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Publication No.: US09741623B2Publication Date: 2017-08-22
- Inventor: Min Gyu Sung , Chanro Park , Ruilong Xie , Hoon Kim
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/092

Abstract:
One illustrative method disclosed herein includes, among other things, performing a first trench etching process to define an upper portion of a first fin for an NFET device and an upper portion of a second fin for a PFET device, performing a first conformal deposition process to form a conformal etch stop layer around the upper portion of both the first and second fins, with the NFET device masked, performing a second trench etching process to define a lower portion of the second fin, and performing a second conformal deposition process to form a conformal protection layer adjacent the upper portion of the second fin and on sidewalls of the lower portion of the second fin.
Public/Granted literature
- US20170053835A1 DUAL LINER CMOS INTEGRATION METHODS FOR FINFET DEVICES Public/Granted day:2017-02-23
Information query
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