Invention Grant
- Patent Title: Optical inspecting apparatus
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Application No.: US14823343Application Date: 2015-08-11
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Publication No.: US09746430B2Publication Date: 2017-08-29
- Inventor: Tae-Joong Kim , Young-Kyu Park , Ki-Jung Son , Byeong-Hwan Jeon , Chang-Hoon Choi
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2014-0169975 20141201
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/956 ; G01N21/958

Abstract:
An optical inspecting apparatus includes a first light source, a beam splitter, a first lens, a first light detector, and pinhole plates. The first light source emits a first light beam. The beam splitter transmits or reflects the first light beam. The first lens provides the first light beam to transmit through a transparent substrate of a photomask and forms a first focusing spot on a first surface of the transparent substrate or a top surface of a photomask pattern formed on the transparent substrate. The first light detector detects a first reflection light beam generated by reflecting the first light beam from the first surface of the transparent substrate or the top surface of the photomask pattern. The pinhole plates are disposed in front of the first light detector to filter noise in the reflection light beam.
Public/Granted literature
- US20160153918A1 OPTICAL INSPECTING APPARATUS Public/Granted day:2016-06-02
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