公开(公告)号：US09839110B2

公开(公告)日：2017-12-05

申请号：US15222571

申请日：2016-07-28

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Wook-Rae Kim ,  Won-Don Joo ,  Byeong-Hwan Jeon ,  Sung-Hwi Cho ,  Young-Kyu Park ,  Jung-Chul Lee ,  Jin-Woo Ahn

IPC: H01J5/16 ,  H01K1/30 ,  H05H1/46 ,  H05G2/00 ,  H05H1/24

CPC classification number: H05H1/46 ,  H01J61/025 ,  H01J61/30 ,  H01J61/54 ,  H01J65/04 ,  H05G2/00 ,  H05H1/24 ,  H05H2240/00

Abstract: A plasma light source apparatus includes a first laser generator configured to generate a first laser. A second laser generator is configured to generate a second laser. A chamber is configured to accommodate and seal a medium material for plasma ignition and to allow plasma to be ignited by the first laser and to be maintained by the second laser. An inner surface of the chamber includes two curved mirrors that face each other.

公开(公告)号：US09746430B2

公开(公告)日：2017-08-29

申请号：US14823343

申请日：2015-08-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Joong Kim ,  Young-Kyu Park ,  Ki-Jung Son ,  Byeong-Hwan Jeon ,  Chang-Hoon Choi

IPC: G01N21/00 ,  G01N21/956 ,  G01N21/958

CPC classification number: G01N21/956 ,  G01N21/958 ,  G01N2021/95676

Abstract: An optical inspecting apparatus includes a first light source, a beam splitter, a first lens, a first light detector, and pinhole plates. The first light source emits a first light beam. The beam splitter transmits or reflects the first light beam. The first lens provides the first light beam to transmit through a transparent substrate of a photomask and forms a first focusing spot on a first surface of the transparent substrate or a top surface of a photomask pattern formed on the transparent substrate. The first light detector detects a first reflection light beam generated by reflecting the first light beam from the first surface of the transparent substrate or the top surface of the photomask pattern. The pinhole plates are disposed in front of the first light detector to filter noise in the reflection light beam.

公开(公告)号：US09374883B2

公开(公告)日：2016-06-21

申请号：US14560732

申请日：2014-12-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young-Kyu Park ,  Wook-Rae Kim ,  Byeong-Hwan Jeon ,  Hashimoto Kohei

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/003

Abstract: A plasma light source apparatus is provided. The plasma light source apparatus includes a chamber, a laser generating part, and a curved mirror. The chamber includes a plasma source gas for generating laser induced plasma. The laser generating part is spaced apart from the chamber and generates a hollow laser beam. The curved mirror is disposed between the chamber and the laser generating part. The curved mirror is configured to reflect and to condense the generated hollow laser beam into the chamber to generate the laser induced plasma in the chamber, and to reflect light emitted from the generated laser induced plasma.

Abstract translation: 提供了一种等离子体光源装置。 等离子体光源装置包括腔室，激光产生部件和曲面镜。 腔室包括用于产生激光诱导等离子体的等离子体源气体。 激光产生部分与腔室间隔开并产生中空的激光束。 曲面镜设置在腔室和激光产生部件之间。 曲面镜被配置为反射并将产生的中空激光束冷凝到腔室中，以在腔室中产生激光感应等离子体，并且反射从产生的激光诱导等离子体发射的光。