Invention Grant
- Patent Title: Height measurement using optical interference
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Application No.: US15093198Application Date: 2016-04-07
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Publication No.: US09752865B1Publication Date: 2017-09-05
- Inventor: Richard A. Haight , James B. Hannon , Rudolf M. Tromp
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/14 ; G01B9/02 ; G03F7/20

Abstract:
Methods and systems for measuring a distance include measuring a first interference pattern between a lens and a target surface using a light source at a first wavelength. A second interference pattern is measured between the lens and the target surface using a light source at a second wavelength, different from the first wavelength. An absolute measurement of a distance between the lens and the target surface is determined based on the first interference pattern and the second interference pattern.
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