Invention Grant
- Patent Title: Converging mirror furnace
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Application No.: US14362348Application Date: 2012-11-30
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Publication No.: US09777375B2Publication Date: 2017-10-03
- Inventor: Shinichi Ikeda , Shiro Hara , Takanori Mikahara , Hitoshi Habuka , Sommawan Khumpuang
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Tokyo
- Agency: Law Office of Katsuhiro Arai
- Priority: JP2011-264939 20111202
- International Application: PCT/JP2012/081093 WO 20121130
- International Announcement: WO2013/081107 WO 20130606
- Main IPC: C30B13/16
- IPC: C30B13/16 ; C23C16/48 ; F27B17/00 ; H01L21/67 ; C30B13/24 ; F27D99/00

Abstract:
Provide a converging mirror-based furnace for heating a target by way of reflecting from a reflecting mirror unit the light emitted from a light source and then irradiating a target with the reflected light, wherein said target-heating converging-light furnace is such that: the reflecting mirror unit comprises a primary reflecting mirror and secondary reflecting mirror; the light emitted from the light source is reflected sequentially by the primary reflecting mirror and secondary reflecting mirror and then irradiated onto the target; and the light reflected by the secondary reflecting mirror and irradiated onto the target surface is not perpendicular to the target surface. Based on the above, a system that uses converged infrared light to provide heating can be made smaller while keeping its heating performance intact, even when the system uses a revolving ellipsoid.
Public/Granted literature
- US20140338591A1 CONVERGING MIRROR FURNACE Public/Granted day:2014-11-20
Information query
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