公开(公告)号：US09777375B2

公开(公告)日：2017-10-03

申请号：US14362348

申请日：2012-11-30

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Shinichi Ikeda ,  Shiro Hara ,  Takanori Mikahara ,  Hitoshi Habuka ,  Sommawan Khumpuang

IPC: C30B13/16 ,  C23C16/48 ,  F27B17/00 ,  H01L21/67 ,  C30B13/24 ,  F27D99/00

CPC classification number: C23C16/482 ,  C30B13/24 ,  F27B17/0025 ,  F27D2099/0026 ,  H01L21/67115 ,  Y10T117/108

Abstract: Provide a converging mirror-based furnace for heating a target by way of reflecting from a reflecting mirror unit the light emitted from a light source and then irradiating a target with the reflected light, wherein said target-heating converging-light furnace is such that: the reflecting mirror unit comprises a primary reflecting mirror and secondary reflecting mirror; the light emitted from the light source is reflected sequentially by the primary reflecting mirror and secondary reflecting mirror and then irradiated onto the target; and the light reflected by the secondary reflecting mirror and irradiated onto the target surface is not perpendicular to the target surface. Based on the above, a system that uses converged infrared light to provide heating can be made smaller while keeping its heating performance intact, even when the system uses a revolving ellipsoid.

公开(公告)号：US20140338591A1

公开(公告)日：2014-11-20

申请号：US14362348

申请日：2012-11-30

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Shinichi Ikeda ,  Shiro Hara ,  Takanori Mikahara ,  Hitoshi Habuka ,  Sommawan Khumpuang

IPC: C23C16/48 ,  C30B13/24

CPC classification number: C23C16/482 ,  C30B13/24 ,  F27B17/0025 ,  F27D2099/0026 ,  H01L21/67115 ,  Y10T117/108

Abstract: Provide a converging mirror-based furnace for heating a target by way of reflecting from a reflecting mirror unit the light emitted from a light source and then irradiating a target with the reflected light, wherein said target-heating converging-light furnace is such that: the reflecting mirror unit comprises a primary reflecting mirror and secondary reflecting mirror; the light emitted from the light source is reflected sequentially by the primary reflecting mirror and secondary reflecting mirror and then irradiated onto the target; and the light reflected by the secondary reflecting mirror and irradiated onto the target surface is not perpendicular to the target surface. Based on the above, a system that uses converged infrared light to provide heating can be made smaller while keeping its heating performance intact, even when the system uses a revolving ellipsoid.

Abstract translation: 提供一种会聚反射镜式炉，用于通过从反射镜单元反射从光源发射的光然后用反射光照射目标来加热目标，其中所述目标加热会聚光炉使得： 反射镜单元包括主反射镜和次反射镜; 从光源发射的光被主反射镜和次反射镜依次反射，然后照射到目标上; 并且由二次反射镜反射并被照射到目标表面上的光不与目标表面垂直。 基于上述，即使系统使用旋转椭圆体，也可以使使用会聚红外线来提供加热的系统更小，同时保持其加热性能不变。