Invention Grant
- Patent Title: Handler apparatus that conveys a device under test to a test socket and test apparatus including the handler apparatus
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Application No.: US14472392Application Date: 2014-08-29
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Publication No.: US09784789B2Publication Date: 2017-10-10
- Inventor: Aritomo Kikuchi , Tsuyoshi Yamashita , Mitsunori Aizawa , Hiromitsu Horino , Yuya Yamada , Masataka Onozawa
- Applicant: ADVANTEST CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADVANTEST CORPORATION
- Current Assignee: ADVANTEST CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: KR2014-0034343 20140325
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/04 ; G01C11/00

Abstract:
Provided is a handler apparatus that conveys a device under test to a test socket, including: a socket for adjustment which, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder; a socket-for-adjustment position detecting section that detects a relative position of the device under test with respect to the socket for adjustment, in a state in which the device holder fits the socket for adjustment; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the device under test; and a conveyer that conveys the device holder, in which a position of the device under test has been adjusted, to fit the test socket.
Public/Granted literature
- US20150276862A1 Handler Apparatus and Test Apparatus Public/Granted day:2015-10-01
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