Invention Grant
- Patent Title: Method of manufacturing nanostructure semiconductor light-emitting device
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Application No.: US14867659Application Date: 2015-09-28
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Publication No.: US09842960B2Publication Date: 2017-12-12
- Inventor: Jae Hyeok Heo , Jin Sub Lee , Young Jin Choi , Hyun Seong Kum , Ji Hye Yeon , Dae Myung Chun , Jung Sub Kim , Han Kyu Seong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, PLC
- Priority: KR10-2014-0132545 20141001
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/20 ; H01L33/06 ; H01L33/08 ; H01L33/14 ; H01L33/24

Abstract:
According to an example embodiment, a method of manufacturing a nanostructure semiconductor light-emitting device includes forming nanocores of a first-conductivity type nitride semiconductor material on abase layer to be spaced apart from each other, and forming a multilayer shell including an active layer and a second-conductivity type nitride semiconductor layers on surfaces of each of the nanocores. At least a portion the multilayer shell is formed by controlling at least one process parameter of a flux of source gas, a flow rate of source gas, a chamber pressure, a growth temperature, and a growth rate so as to have a higher film thickness uniformity.
Public/Granted literature
- US20160099376A1 METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT-EMITTING DEVICE Public/Granted day:2016-04-07
Information query
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