Invention Grant
- Patent Title: Cobalt polishing accelerators
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Application No.: US15603634Application Date: 2017-05-24
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Publication No.: US09850403B2Publication Date: 2017-12-26
- Inventor: Steven Kraft , Andrew Wolff , Phillip W. Carter , Kristin Hayes , Benjamin Petro
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson; Francis J. Koszyk
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/461 ; C09G1/02 ; B24B37/04 ; C23F3/04 ; H01L21/321

Abstract:
The invention provides a chemical-mechanical polishing composition comprising (a) abrasive particles, (b) a cobalt accelerator selected from a compound having the formula: NR1R2R3 wherein R1, R2, and R3 are independently selected from hydrogen, carboxyalkyl, substituted carboxyalkyl, hydroxyalkyl, substituted hydroxyalkyl and aminocarbonylalkyl, wherein none or one of R1, R2, and R3 are hydrogen; dicarboxyheterocycles; heterocyclylalkyl-α-amino acids; N-(amidoalkyl)amino acids; unsubstituted heterocycles; alkyl-substituted heterocycles; substituted-alkyl-substituted heterocycles; N-aminoalkyl-α-amino acids; and combinations thereof, (c) a cobalt corrosion inhibitor, (d) an oxidizing agent that oxidizes a metal, and (e) water, wherein the polishing composition has a pH of about 3 to about 8.5. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.
Public/Granted literature
- US20170260421A1 COBALT POLISHING ACCELERATORS Public/Granted day:2017-09-14
Information query
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