Invention Grant
- Patent Title: Method of inspecting a specimen and system thereof
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Application No.: US14728495Application Date: 2015-06-02
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Publication No.: US09851714B2Publication Date: 2017-12-26
- Inventor: Michele Dalla-Torre , Amit Batikoff , Efrat Rozenman , Ron Katzir , Imry Kissos
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G05B19/418 ; G06K9/62 ; G06T7/00

Abstract:
There are provided a method of inspecting the inspection area and an inspection system thereof. The inspection system comprises an inspection control unit operatively coupled to an inspection tool unit and to a recipe generating unit. The inspection control unit is configured to obtain the design data and the inspection recipe; to provide local segmentation of at least one inspection PoI comprised in an inspection image captured from the inspection area by the inspection tool unit, thereby obtaining inspection structural elements comprised in the at least one inspection PoI, the local segmentation is provided using segmentation configuration data specified in the inspection recipe; to identify one or more target structural elements and design structural elements corresponding thereto, identifying is provided using design association data specified in the inspection recipe; and to enable metrology measurements for the one or more target structural elements using the identified design structural elements.
Public/Granted literature
- US20160350905A1 METHOD OF INSPECTING A SPECIMEN AND SYSTEM THEREOF Public/Granted day:2016-12-01
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